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http://ir.library.ui.edu.ng/handle/123456789/1678| Title: | Electron beam decomposition of CdCl2 |
| Authors: | Green, M. Aidinis, C. J. Fakolujo, O. A. |
| Issue Date: | 1984 |
| Publisher: | American Institute of Physics. |
| Abstract: | The e-beam stimulated reaction, CdCl2 (s)----Cd(s) + 2Cl(g), has been studied in cadmium chloride thin films between 303 and 483K using 2-keV electrons. The dose required to make 90-mm-deep holes at 483K is 3 X10-3 Ccm-2. Extrapolated dosing levels of ~6X10-5 C cm-2 are expected. The use of CdCl2 as a positive-type electron resist in a new scheme is proposed. A working model, useful for considering the e-beam stimilated decomposition energetics and mechanism, is briefly discussed. |
| URI: | http://ir.library.ui.edu.ng/handle/123456789/1678 |
| ISSN: | 0021-8979 1089-7550 |
| Appears in Collections: | scholarly works |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| (12)ui_art_green_electron_1984.pdf | 868.68 kB | Adobe PDF |  View/Open |
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